Centre for Research in Nanotechnology & Science (CRNTS)
Indian Institute of Technology - Bombay
Centre of Excellence in Nanoelectronics
Facilities
Facilities available for carrying out the proposed R&D work in the applicant's and collaborator's institution:
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Class 1000 Clean Room (class 100 work areas) with facilities for complete IC manufacturing (Optical & Electron Beam lithography, Reactive-Ion-Etch, Deposition, Sputter, RTP, Furnace facilities)
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MEMS/Nanoelectronics fabrication facility
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AFM, STM, ESCA, XRD, TEM
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Raman Spectroscopy
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Dynamic light scattering system with Zeta particle meter
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Nanoparticle spray dryer with electro spray coating
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Scanning mobility particle sizer
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Dip Pen lithography
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Cell Sorter/FACS
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Tissue Culture room
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Dektak profilometer
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Cryo TEM, E-SEM
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Sample preparation for soft materials
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Multi-photon confocal microscope
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Excimer laser
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Micromap, Micro PIV
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Small angle X-ray scattering
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Probe stations, Low-noise measurements
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SEM; photoluminescence
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VLSI design workstations
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VLSI design tools
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Cadence, Mentor, Synopsys, Tanner, Xilinx, plus many public domain tools
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Simulation workstations
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Simulation software
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Medici, TSuprem, ISE-TCAD, SMC (Monte Carlo)
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Gaitonde Integrated Systems Laboratory
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Intel Microelectronics Lab
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TCS VLSI Design Lab
IIT Bombay is also setting up a Centre of Excellence in Nanoelectronics, as part of a Govt. of India initiative. More details about this centre facilities are available at http://www.cen.iitb.ac.in. These facilities will be available for the Nanotehnology project investigators and other faculty members at IIT Bombay.
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